DPS系列干式螺杆真空泵

功率：2.98～8.94KW

气量：80～1800m³/hr

排气压力：≤1/≤0.1 Pa

传动方式：280～545KG

冷却方式：≤68DB(A)

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产品信息

参数列表

产品应用

DPS系列干式螺杆真空泵特点：

排气路径短，减少反应物沉积/Exhaust Path Is Short, Reduce The Deposition Of Reactants.

●干式螺旋真空泵相较于其他形式的真空泵，因气体于泵浦内的传输路径更短，更不易产生反应物沉积的现象/Comparing with other types of dry vacuum pump,DENAIR screw vacuum pump has the shortest gas path in the vacuum pump and that could reduce the contamination of process gas. Screw rotors can play as a powder transmission mechanism,we runs well even there has lots of contamination inside the pump.

线形密封性佳，泵浦性能更优/The Optimal Linear Sealing, The Pump Performance

●专利转子密封线形，转子密封性佳，转子能以较大的啮合间隙达到更快的抽气效果。由于啮合间隙较大，泵浦较不易因制程气体沉积而卡死，转子也较不易因麿耗而需更换/Patented rotor profile can provide rotor excellent sealing effects thus a larger clearance is allowable in between.Pump rotor wesring and rotor jam by the process contamination can be reduced by larger allowable clearcance.

结构简单，故障率低，维修容易/Simple Structure, Low Fault Rate And Easy Maintenance

●螺旋式真空泵因需利用一对转子互相啮合达到密封效果，结构上不像其他形式的真空泵需要有中间隔板的设计，降低转子与隔板沉积卡死的风险。且因其结构单纯，拆解维修也较容易，因此能缩短维修时程，降低维修费用/Screw type vacuum is composed by a pair of screw rotor and isolation plates are required in different between rotors and isolation plates can also be avoided.Overhaul Hanbell dry pump is much easier than other type of dry pump,so the erpair time is shorter and the cost is saver.

微电脑操作，远端监控，保护周全/Microcomputer Operation, Remote Monitoring, Considerate Protection

●微电脑操控器提供真空泵浦更简单的操作方式并能显示泵浦完整的运转状态，方便使用者对泵浦应用状况进行调整，在泵浦产生问题前进行预防保养。远端监控系统能提供使用者方便的监控工具，使用者不需到现场即能查询泵浦之运转状况/Microprocessor controller provides lots of pump parameters for running status monitoring.Pump can be easily operated and monitored by the operation panel.Remote control software can help the customer monitor the pump running status remotely.

性能优势：

●专用冷却液冷却，避免了冷却水可能对壳体造成腐蚀/Special cooling liquid cooling, to avoid the cooling water may cause corrosion to the hull.

●移动式操作界面，方便操作；显示真空泵实际工作状况，并可选中英两种文字显示，切实贴近客户/Mobile operation interface, convenient operation; Display and the actual work of vacuum pump and can be selected to both languages, according to the real close to the customer.

●军规电源接头，安全方便/Catch the power connector, safe and convenient.

●氮气加热器，使真空泵更适应于CVD、PECVD等半导体制程/The nitrogen gas heater, make the vacuum pump is more suitable for CVD, PECVD and other semiconductor technique process.

●控制讯号及通讯信号接口，可对真空泵进行远端监控/The control signals and communication signal interface, remote monitoring was carried out on the vacuum pump.


型　号 Model		单位	单机Pump Unit			机组Pump Set
型　号 Model		单位	DPS80	DPS160	DPS180	DPS602	DPS902	DPS1302	DPS1802
抽速(50HZ/60HZ)		L/min	1300/1600	2150/2600	2500/3000	8300/10000	12500/15000	17500/20000	25000/33300
		m³/hr	80/96	140/156	150/180	500/600	750/900	1050/1260	1500/1800
		cfm	48/57	82/92	88/105	294/353	441/530	618/742	883/1060
终极压力		Torr	≤7.5*10-³			≤7.5*10-⁴
		mbar	≤1*10-²			≤1*10-³
		Pa	≤1			≤0.1
马达	频率	HZ	50/60
	电压	V	220～440
	功率	Hp	4	6	6	4+4	6+4	6+6	6+6
	功率	KW	2.98	4.47	4.47	2.98+2.98	4.47+2.98	4.47+4.47	4.47+4.47
连接	进气口		NW50			ISO100		ISO160
连接	排气口		NW40
冷却水	流量	L/min	3～7
	压力	kg/cm²	2.0～4.0
	温度	℃	18～30			15～30
	接头		RC3/8²
氮气N₂	压力	Mpa	0.15～0.2/td>
	稀释流量	L/min	0-60
	密封流量	L/min	0-20
	接头		Swagelok1/4²
尺寸(L×W×H)		mm	814×380×663	895×405×678	920×425×650	814×380×865	895×380×915	920×430×957	920×430×1030
重量		kg	280	300	320	450	520	540	545
噪音		dB(A)	≤68	≤70	≤70	≤70	≤70	≤70	≤70
			备注：1、以上噪音值为搭配水冷电机无外罩之噪音值。2、以上机型如装隔音装置可再有效降低噪音3～4分贝 Note：1、above the noise value is with water-cooled motor no outer garment of noise value.2、the above models,such as sound insulation devioe can effectively redoue the noise 3-4db.
控制界面			SEMI E73-0299
室温操作范围		℃	5～40
更大操作湿度		RH	90%以上Above